Recent Advances in Ultrafast LaserMicromachining Systems for MaterialMicromanufacturing

A fully integrated 12-axis ultrafast laser micromachining system has been developed for advanced micromanufacturing. This is a highly sophisticated dual-head fully diode-pumped picosecond Nd:YVO4 laser fabrication tool operating at 532 and 355nm, currently offering the highest output average power with output frequency ranging up to 640 kHz. It is designed to harness the benefits of ultrafast laser technology for manufacturing micro-components with emphasis on both high precision and high processing speed, achieving order of magnitude higher removal rates comparing to femtosecond laser technology. This paper describes the system concept and key features including advanced pulse output control, optical train with integrated auto trepanning head and galvanometric scanning heads, in-situ surface profiling diagnostics and also fully automated CAM software for five-axis toolpath generation. Excellent performance for micro-manufacturing is demonstrated with impressive results achieved in different industrial materials.