Guide plates are a component of vertical probe cards. A vertical probe card is a test interface which sits between automated test equipment (ATE) and a device-under-test (DUT). The guide plate consists of thousands of micro holes through which probes are fitted to ensure accurate location of each probe during testing of the DUT.
Precision is a key factor in the production of fine pitch guide plates.
Technological advances in semiconductor manufacturing are placing demands on suppliers of test equipment. The number of test points are increasing whilst the size and separation of the test pads is decreasing. Guide plates require an increasingly tighter pitch, which in turn affects hole size.
Additional challenges also include repeatability. A good robust repeatable process requires a very high positional accuracy to produce and maintain good yield.
Different hole shapes have brought about more challenges. For example, in the production of square and rectangular holes (as commonly used for MEMS probes) the challenge to manufacturers is to reduce corner radii.
Oxford Lasers have been producing guide plates for market leaders in the probe card industry for over 18 years. Our experience and knowledge have resulted in cutting edge developments throughout the technological curve.
If you would like more information or to request a quote, please contact us today.